The characteristics of Auger depth profile as a method for superlattice structure analysis, as well as its limitations, are discussed.
讨论了用俄歇深度剖面分布作超晶格结构分析的特点及其局限性。
The superlattice structure will become new dislocation source and decrease crystalline quality if the superlattice structure is not flat, which is caused by other factors.
如果样品中由于其他因素造成超晶格层起伏较大，那么超晶格层不仅起不到过滤缺陷的作用还会成为新的缺陷源，降低外延层质量。
Our results indicate that the quantum dot superlattice structure with spatial ordering is more suitable to be utilized in the infrared photodetector than the structure without spatial ordering.
结果表明空间有序的量子点超晶格结构比空间无序的量子点超晶格更适宜作红外探测器结构。
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